SUBJECT: Semiconductor wafer fab datasets available. SUMMARY: A set of factory-level datasets describing several semiconductor wafer fabrication facilities is available from this site and via anonymous ftp. The datasets have been made available in order to facilitate the evaluation and comparison of simulation tools, analytic tools, and fab control strategies. OVERVIEW: There currently exist a wide variety of commercial, corporate, and university developed simulation and analytical tools for the analysis of wafer fabs. There have also been a number of strategies and rules developed to control the flow of product in a wafer fab. However, it has been difficult for semiconductor manufacturers, as well as for suppliers and researchers, to evaluate and compare these tools and strategies. One of the major problems in such comparisons has been the lack of representative data. The purpose of this effort was to provide planners, researchers and software suppliers with actual data and models that can be used to benchmark their control strategies and software. The data set format was developed by Gerry Feigin (IBM), John Fowler (SEMATECH-now ASU), and Robert Leachman (University of California- Berkeley). The datasets are available to anyone. DETAILS -- FACTORY LEVEL DATASETS The factory level datasets are available on this site and via anonymous ftp from 'ftp.sematech.org' in directory '/pub/datasets'. The testbed includes actual manufacturing data from several wafer fabrication facilities, organized into a standard format. The data sets do not include real product names, company names or other nomenclature that could serve to identify the source of the data. The datasets are as nonsensitive as possible, so that they may be widely circulated. The goal in development of the fab level data sets was to include the minimum information necessary to model a factory. In support of this goal, the data sets were kept as simple as possible, specifically by including data but not modeling assumptions. For example, mean times between failures are provided, but not their distributions. Process holds, engineering holds, and send aheads are also not included. The resulting data is given in six ASCII flat files, containing: product routings and processing times; rework routings; equipment availability; operator availability; product starts; and a comments file. The testbed currently contains 6 factory-level datasets. Some general information about the datasets follows: Dataset Type of Factory # of Products Volume (wafer starts/mo) Set1 Non-volatile memory 2 16,000 Set2 ASIC & Memory 7 10,000 Set3 Memory, various types 11 21,400 Set4 Microprocessors 7 3,400 Set5 ASIC 177 10,000 Set6 ASIC 9 5,500 More information is included in the comments file provided with each dataset. The comments files all have the ending .cf (e.g. set1.cf). The comments files each include a revision number for the dataset, and a list of changes made since the last revision was published. For information on the testbed dataset format, download testbed.ps (postscript version) or testbed.tex (TEX version) from the main directory. Each dataset is in its own directory. One may either download the .zip file(which contains a compressed version of all the other files) or each of the individual files. There is also a copy of an Excel spreadsheet version of the dataset (.xls) in each directory. QUESTIONS? For questions regarding the testbed datasets, contact John Fowler (john.fowler@asu.edu). It is requested that anyone who uploads the testbed datasets send an email to John Fowler with your name, address, and purpose for using the testbed. This will allow us to notify you of any changes to the testbed (e.g. when new datasets are released). It will also be helpful, in general, for us to know how many people are using the testbed, and for what sorts of purposes. Also, if you have a data set that you would like to donate, please contact John Fowler. Thank you. Document Revised August 7, 1997.