Introduction
A set of factory-level datasets describing several semiconductor wafer fabrication facilities is available from this site and via anonymous ftp. The datasets have been made available in order to facilitate the evaluation and comparison of simulation tools, analytic tools, and fab control strategies. For more information about these datasets please view this document.
Overview
|
1
|
Bai, X., Gershwin, S.B.A manufacturing scheduler's perspective on semiconductor fabricationMIT, No. VLSI 89-518, 1989 |
|
2
|
Blackstone, Jr.
MASM Lab Projects & SponsorsProjects & Sponsors
|